我国微电子领域泰斗吴德馨院士逝世

Core Viewpoint - The article highlights the significant contributions of Wu Dexin, a pioneer in China's semiconductor and integrated circuit field, who passed away at the age of 90. Her work laid the foundation for China's chip independence and the development of domestic integrated circuit research systems [1][3]. Group 1: Contributions to Semiconductor Technology - Wu Dexin was a key figure in the development of semiconductor devices and integrated circuits in China, having dedicated 65 years to the microelectronics field. She was instrumental in overcoming critical technological challenges and establishing a domestic research framework [1][3]. - In the early 1960s, she led the development of the silicon planar high-speed switching transistor, which provided essential support for the "Two Bombs, One Satellite" project, solidifying the foundation of national defense electronics [3][4]. - By the late 1970s, she and her team successfully developed the MOS 4K dynamic random-access memory chip, introducing advanced microfabrication techniques such as positive photoresist and dry etching to improve yield rates in domestic integrated circuit production [4]. Group 2: Leadership and Institutional Development - From 1986, Wu Dexin served as the director of the Chinese Academy of Sciences Microelectronics Center, where she coordinated the discipline's layout and resource integration, focusing on "independent control and industry-academia-research collaboration" [4][5]. - Under her leadership, the Microelectronics Center became a core platform for tackling key technologies in integrated circuits and facilitating the transformation of research outcomes, which was crucial for the subsequent domestic substitution process [4][5]. Group 3: Legacy and Impact on Talent Development - Throughout her career, Wu Dexin emphasized the importance of precision in chip manufacturing, famously stating that "a deviation of one micron renders the entire process void," reflecting her rigorous scientific approach [5]. - She was dedicated to nurturing future talent in the microelectronics field, instilling a spirit of independent innovation and training numerous professionals who continue to contribute to China's semiconductor industry [5].