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国产质谱仪器创新发展与应用论坛成功举办,共推半导体产业核心装备自主化
仪器信息网· 2025-12-02 09:07
Core Insights - The "Domestic Mass Spectrometry Instrument Innovation Development and Application Forum" successfully convened, gathering various stakeholders from industry, academia, and research to discuss cutting-edge mass spectrometry technology and its applications in the semiconductor industry [2][14]. Group 1: Forum Overview - The forum was organized by Suzhou Laboratory and co-hosted by several institutions, focusing on the macro planning and ecological construction of domestic scientific instruments and their applications in the semiconductor sector [2]. - Discussions included the "National Instrument High Quality" certification system aimed at enhancing the quality of domestic instruments, as well as the "Domestic Instrument Take-off Action" initiative presented by Beijing Xinlifang Technology Development Co., Ltd. [2]. Group 2: Technical Developments - Reports from various organizations highlighted advancements in whole machine development and key technology breakthroughs, including an analysis of the current state and development strategy of domestic mass spectrometers by Beijing Huairou Science City Mass Spectrometry Technology Research Institute [14]. - Key components and foundational technology autonomy were focal points, with presentations on the development of quadrupole mass spectrometer components and the progress of domestic molecular pump technology [14]. Group 3: Semiconductor Applications - Specific applications of domestic ICP-MS/MS in silicon wafer and wet electronic chemical detection were showcased, along with discussions on the practical challenges and applications of mass spectrometry technology in semiconductor testing and result traceability [15]. - The forum also addressed supporting technologies for gas pollutant detection and ultra-pure reagents, outlining a complete technical chain to ensure semiconductor yield [15]. Group 4: Industry Collaboration - The forum facilitated a high-density agenda that showcased the progress of domestic mass spectrometry technology across components, whole machines, and system applications, establishing an efficient platform for cross-domain collaboration [15]. - The successful hosting of the forum marks a significant step towards overcoming high-end scientific instrument challenges and enhancing the self-sufficiency of the semiconductor industry chain [15].