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厚度仅40微米 高灵敏超薄温度传感器研发成功
Ke Ji Ri Bao· 2025-12-18 09:46
Core Insights - The research team at Xinjiang Institute of Physics and Chemistry has developed a high-sensitivity ultra-thin temperature sensor with a thickness of only 40 micrometers, which is expected to support next-generation electronic skin and wearable devices [1][2]. Group 1: Technology Development - The ultra-thin flexible temperature sensor addresses the challenge of achieving high sensitivity while maintaining excellent flexibility and long-term stability, which is crucial for smart medical and robotic sensing applications [1]. - The team utilized a "water-soluble sacrificial layer-assisted transfer" strategy to overcome the compatibility issues between high-performance sensitive materials and flexible substrates, resulting in a sensor with a total thickness of 40 micrometers [1]. Group 2: Performance Metrics - The sensor exhibits an impressive temperature coefficient of resistance of -4.1%/°C and a response time of only 192 milliseconds, demonstrating its robust performance even under repeated bending and thermal shock [2]. - The design of the heterostructure interface using germanium oxide, tantalum oxide, and manganese cobalt oxide effectively suppresses element diffusion and thermal stress mismatch, enhancing the device's reliability and structural integrity [2].