Core Viewpoint - Review SEM devices are essential for defect analysis and process monitoring in semiconductor manufacturing, particularly as technology nodes shrink below 10nm, necessitating high-resolution imaging for accurate defect classification and analysis [2][5][19]. Industry Background and Development History - Review SEM is a critical tool in semiconductor manufacturing for defect analysis and process optimization, especially as optical defect detection devices face limitations in resolution [2]. - The evolution of Review SEM began in the early 1990s, transitioning from CD-SEM platforms to more automated systems capable of handling complex defect types as technology advanced [3][4]. - The demand for Review SEM surged with the introduction of more intricate multi-patterning structures in nodes below 90nm, leading to a systematic approach to defect analysis [3][5]. Technological Advancements - Key technological developments include low-voltage imaging to minimize sample damage, high-speed automated alignment, and AI-driven defect classification algorithms [6][7][9]. - Current mainstream devices achieve resolutions below 1nm and support low acceleration voltages (0.5–1.5kV), crucial for sensitive materials [7][20]. - Integration with inline process control systems is becoming a trend, allowing Review SEM to work in conjunction with other defect detection equipment [11][12]. Market Structure and Leading Manufacturers - The Review SEM market is highly concentrated, dominated by major players such as Applied Materials, Hitachi High-Technologies, and KLA, with Chinese manufacturers still in the early stages of development [13][28]. - The global market for Review SEM devices is projected to grow from $712 million in 2024 to $1.13 billion by 2031, with a CAGR of 7.06% from 2025 to 2031 [26]. Application Demand Trends - The expansion of wafer fabrication capacity, particularly in 12-inch logic factories and advanced packaging lines, is driving a rigid demand for Review SEM [14][15]. - The transition to EUV masks, which have low defect tolerance, is increasing the need for Review SEM as a standard detection tool [16][17]. - There is a rising demand for Review SEM in advanced packaging processes, indicating a new market expansion direction [18]. Future Development Trends - Review SEM is evolving from a passive inspection tool to an integrated, intelligent defect analysis platform, driven by the need for high precision in defect detection as technology nodes approach physical limits [19]. - The integration of AI for defect classification and image recognition is a key focus, with future developments expected to include unsupervised learning for unknown defect identification [21]. - Enhanced automation for defect positioning and real-time feedback mechanisms are essential for maintaining precision in defect analysis [22][23].