Core Insights - The article highlights the recent announcement of 21 government procurement intentions for various instruments and equipment, with a total budget of 551 million yuan, expected to be procured by December 2025 [1][2]. Procurement Overview - The procurement includes a range of advanced equipment such as optical microscopes, low-pressure plasma-enhanced chemical vapor deposition systems, specialized deep silicon etching machines, multi-chamber cascade film growth systems, atomic layer deposition systems, and critical dimension scanning electron microscopes [1][3]. - The total budget for these procurement intentions is 551 million yuan, indicating significant investment in high-tech instrumentation [1][2]. Detailed Procurement List - The procurement list includes: - 72 optical microscopes for R&D support, budgeted at 25.2 million yuan [3]. - 6 source measurement units for electrical performance testing, budgeted at 4.5 million yuan [3]. - 8 sets of oil-free vacuum pumps for cleanroom applications, budgeted at 1.36 million yuan [3]. - 1 set of low-pressure plasma-enhanced chemical vapor deposition systems for high-quality silicon film deposition, budgeted at 17.5 million yuan [4]. - 2 specialized deep silicon etching machines for high-precision etching, budgeted at 34.62 million yuan [4]. - 2 multi-chamber systems for seamless growth of heterostructures, budgeted at 195 million yuan [4]. - 1 atomic layer deposition system for precise control of thin films, budgeted at 18 million yuan [4]. - 1 critical dimension scanning electron microscope for nanoscale measurements, budgeted at 14.36 million yuan [4]. - Additional equipment includes automated systems for various processes, such as developing and etching, with budgets ranging from 1.5 million to 30 million yuan [4][5]. Conclusion - The procurement intentions reflect a strong commitment to advancing research and development capabilities in high-tech fields, particularly in quantum technology and semiconductor manufacturing [1][2].