热/电子束蒸发设备
Search documents
2.14亿元!zycgr采购大批仪器设备
仪器信息网· 2025-11-05 09:10
Core Insights - The article discusses the recent announcement by zycgr regarding nine procurement intentions for scientific instruments, with a total budget of 214 million yuan [2][3]. Procurement Overview - The procurement includes various advanced instruments such as Atomic Layer Deposition Systems, Vertical Chemical Vapor Deposition Systems (CVD), Thermal/Electron Beam Evaporation Equipment, Atomic Force Microscopes, and Plasma Enhanced Chemical Vapor Deposition Systems [3][4][5][7]. - The expected procurement timeline is set for October to November 2025 [3]. Instrument Details - **Vertical Chemical Vapor Deposition System (CVD)**: This system is designed for thin film deposition and is widely used in semiconductor manufacturing, optoelectronics, solar cells, and nanomaterials. It operates by depositing thin films through gas-phase chemical reactions [4]. - **Atomic Layer Deposition System (ALD)**: This advanced equipment allows for precise deposition of nanometer-scale thin films using self-limiting surface reactions [5]. - **Plasma Enhanced Chemical Vapor Deposition System (PECVD)**: This technology is utilized for thin film preparation in various high-tech fields, enabling deposition at lower temperatures through plasma activation [7]. Detailed Procurement List - The procurement list includes: - Automated Antibody Protein System: Budget of 18.72 million yuan for high-quality antigen-antibody interaction data collection [9]. - 6000m Pressure-resistant Multibeam Depth Measurement System: Budget of 1.9 million yuan [9]. - Atomic Layer Deposition System: Budget of 2.8 million yuan [9]. - Vertical CVD System: Budget of 3.2 million yuan [10]. - Thermal/Electron Beam Evaporation Equipment: Budget of 2.5 million yuan [10]. - Atomic Force Microscope: Budget of 2.75 million yuan [10]. - Plasma Enhanced Chemical Vapor Deposition System: Budget of 5 million yuan [10].