电子束专用涂胶机
Search documents
1.29亿元!清华大学最新仪器采购意向
仪器信息网· 2026-01-26 09:02
Core Viewpoint - Tsinghua University has announced multiple government procurement intentions for various instruments and equipment, with a total budget of 129 million yuan, indicating significant investment in advanced technology and research capabilities [1][2]. Procurement Summary - The procurement includes eight items, with a total budget of 129 million yuan, scheduled for purchase in January 2026 [2]. - The specific items and their respective budgets are as follows: - Electron Beam Coating Machine: 6.5 million yuan [4] - HF-XeF2 Dry Etching System: 6 million yuan [4] - Chemical Mechanical Polishing Equipment: 10 million yuan [4] - High-Precision Flip Chip Bonding System: 10 million yuan [4] - Thinning and Cleaning Integrated Machine: 5 million yuan [4] - Laser Scribing Machine: 7 million yuan [4] - Multi-Chamber Physical Vapor Deposition System: 60 million yuan [4] - Wafer-Wafer Vacuum Bonding System: 25 million yuan [4]