一场盛大的"半导体嘉年华"顺利举办！ 9月4日至6日，第十三届中国电子专用设备工业协会半导体设备年会、第十三届半导体设备与核心部件及材料展（CSEAC 2025）在无锡太湖国际博览中心 举办。本届大会以"做强中国芯，拥抱芯世界"为主题，集中呈现了半导体关键设备、支撑配套设备、核心部件、关键材料以及新兴材料等领域的最新研发 成果和创新进展。 先导集团展台聚焦半导体产业链布局，重点展示了旗下产业园企业的核心产品，工作人员向记者介绍了该公司在半导体领域的一系列布局与参展亮点。 上海证券报邱思雨摄 "CSEAC举办十多年来，搭建起我国半导体装备、零部件企业与制造企业合作推广的桥梁，为国产产品进入国内外产业链和全球采购体系创造了直观全面 的商机，成为客户与供应商对接、行业交流的友好平台。"中国电子专用设备工业协会相关负责人接受记者采访时表示。 多家企业携核心产品亮相 展会现场人头攒动，热度高涨。展会期间，中微公司正式发布六款半导体设备新品，覆盖等离子体刻蚀（Etch）、原子层沉积（ALD）及外延（EPI）等 多个关键工艺领域。 刻蚀设备方面，新一代极高深宽比等离子体刻蚀设备Primo UD-RIE®和专注于金属刻蚀的P ...

Core Insights - Company announced the launch of six new semiconductor equipment products at CSEAC2025, covering critical processes such as plasma etching, atomic layer deposition (ALD), and epitaxy (EPI) [1] - R&D investment reached 1.492 billion yuan in the first half of 2025, a year-on-year increase of approximately 53.70%, representing about 30.07% of the company's revenue, significantly higher than the average R&D investment level of 10% to 15% for companies listed on the Sci-Tech Innovation Board [1] - The company has over 20 new equipment projects under development, with a significant reduction in development cycle time from 3-5 years to as short as 2 years [1] Product Highlights - Two new etching products were launched, including the CCP capacitive high-energy plasma etching machine Primo UD-RIE, designed for high aspect ratio etching, and the Primo Menova 12-inch ICP single-chamber etching equipment, focused on metal etching applications [2] - The Preforma Uniflash metal gate series in atomic layer deposition includes three products, catering to advanced logic and memory device applications [3] - The PRIMIO Epita RP, the world's first dual-chamber low-pressure epitaxy equipment, features a unique design that reduces production costs and chemical consumption while maintaining high production efficiency [3] Market Position - As a leader in high-end semiconductor equipment manufacturing in China, the company's plasma etching equipment is utilized by top international clients across various advanced integrated circuit production lines, covering 95% of domestic etching application needs [4] - The company has delivered over 6,800 plasma etching and chemical film equipment reaction chambers, achieving mass production and large-scale repeat sales across 155 production lines domestically and internationally [4]