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中国取得EUV技术重要突破,阿斯麦CEO还在嘴硬…

Core Viewpoint - The increasing pressure and restrictions from the West are prompting China to accelerate its efforts in independent innovation, particularly in the field of extreme ultraviolet (EUV) lithography technology [1][13]. Group 1: Research and Development Achievements - Chinese researchers have established a competitive EUV light source experimental platform, which is significant for the independent development of EUV lithography and its key components and technologies [1][7]. - The research team, led by Lin Nan from the Shanghai Institute of Optics and Fine Mechanics, has developed a laser-driven plasma EUV light source (LPP-EUV), which is a core component of lithography machines [7][10]. - The maximum conversion efficiency achieved by Lin's team is 3.42%, which is among the top internationally and leads domestically, with potential theoretical maximum efficiency estimated to be close to 6% [10][11]. Group 2: Comparison with International Standards - The conversion efficiency of the developed solid laser-driven EUV light source is noted to be higher than the commercial CO2 laser-driven EUV light sources, which have a conversion efficiency of approximately 5.5% [11]. - Lin's team's efficiency surpasses previous records from institutions such as the Advanced Research Center for Nanolithography (ARCNL) and ETH Zurich, but is still behind the University of Central Florida and Utsunomiya University [11][13]. Group 3: Industry Context and Challenges - The EUV lithography machine is essential for the mass production of advanced chips, with ASML being the only manufacturer capable of producing such machines, which are currently restricted from being sold to China [13][15]. - ASML's CEO has stated that while China may eventually produce some EUV light sources, it will take many years to develop a complete EUV lithography machine [2][13]. - Despite the restrictions, ASML plans to establish a new recycling and maintenance center in Beijing by 2025, indicating a strategy to maintain its market presence in China [15][16].