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微导纳米(688147.SH):开发的国内首台成功应用于集成电路制造前道生产线的量产型High-k ALD设备

Core Viewpoint - MicroGuide Nano (688147.SH) is a leading domestic supplier of ALD equipment, with products covering mainstream ALD film materials and processes required in the industry [1] Group 1: Company Overview - The company has developed the first domestically successful mass production High-k ALD equipment for integrated circuit manufacturing, addressing the critical High-k gate oxide film process for nodes below 28nm [1] - The company is continuously expanding its technological coverage by developing and launching solutions such as HKMG technology, column capacitors, metallization film deposition technology, and high aspect ratio 3D NAND, 3D DRAM, and TSV technologies [1] Group 2: Industry Insights - ALD technology has promising application prospects in advanced semiconductor film deposition processes, particularly in nodes below 45nm and 3D structures, making it one of the fastest-growing areas in semiconductor equipment [1] - The company's ALD technology solutions cover major application scenarios in logic chips, memory chips, advanced packaging, compound semiconductors, and new displays (silicon-based OLED) [1]