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光刻机:半导体设备价值之冠,国产替代迎来奇点时刻:光刻机行业深度研究报告

Investment Rating - The report maintains a "Recommendation" rating for the lithography machine industry, highlighting its significance in semiconductor equipment [1]. Core Insights - Lithography machines are the most complex and highest value segment in semiconductor equipment, with a market share of approximately 24% in 2024 [4][10]. - The evolution of lithography technology follows the Rayleigh criterion, with advancements in light source wavelength, numerical aperture, and process factor optimization driving continuous breakthroughs in process nodes [5][20]. - The global market is dominated by ASML, Canon, and Nikon, with ASML holding a market share of 61.2% in 2024, particularly in the ArFi immersion and EUV sectors [5][6]. Summary by Sections Section 1: Lithography as the Core Process in Wafer Manufacturing - Lithography is crucial for transferring circuit patterns onto silicon wafers, directly influencing device size, line width, and integration density [10][11]. - The lithography machine's value is the highest among semiconductor equipment, accounting for 24% of the global semiconductor equipment market in 2024 [19][20]. Section 2: Evolution of Lithography Technology - The report outlines five generations of lithography machines, detailing the transition from mercury lamps to DUV and EUV technologies, which have enabled the manufacturing of smaller process nodes [20][22]. - The Rayleigh criterion defines the relationship between critical dimension, wavelength, and numerical aperture, guiding the technological advancements in lithography [20][21]. Section 3: Global Market Dynamics - The report reviews the historical evolution of leading companies in the lithography market, emphasizing ASML's strategic advancements through immersion and EUV technologies [5][6]. - The report highlights the urgency for domestic alternatives in China due to high reliance on imports and geopolitical pressures, with significant policy support driving local technological advancements [5][6]. Section 4: Relevant Companies - The report identifies key domestic companies such as Maolai Optical, Huicheng Vacuum, Wavelength Optics, and Fuzhijing Technology, which are positioned to benefit from the acceleration of domestic lithography machine production [5][6].