EUV光刻机“秘史”！

Core Viewpoint - The article discusses the evolution and commercialization of Extreme Ultraviolet (EUV) lithography technology, highlighting the geopolitical implications and the significant contributions from various research institutions, particularly in the U.S. and the eventual dominance of ASML in the market [1][22][23]. Group 1: Semiconductor Lithography Technology - Moore's Law indicates that the number of transistors on integrated circuits doubles approximately every two years, largely due to advancements in lithography technology [1]. - The latest advancement in lithography is EUV technology, which uses light with a wavelength of 13.5 nanometers to create patterns on chips [1][22]. - The development of EUV technology involved significant investment and research from U.S. institutions like DARPA, Bell Labs, and IBM, amounting to hundreds of millions of dollars over decades [1][22]. Group 2: Historical Context of Lithography Techniques - Early semiconductor lithography used mercury lamps emitting light at 436 nanometers, but diffraction limited the ability to create smaller features [2][4]. - Alternative methods like electron beam lithography and X-ray lithography were explored, but they faced challenges such as slow processing speeds and the complexity of X-ray sources [4][5][6]. - Optical lithography continued to evolve through techniques like immersion lithography and phase-shifting masks, delaying the need to transition to new technologies [6][8]. Group 3: Development of EUV Technology - The transition to EUV technology began in the 1990s, with significant contributions from various research labs and companies, including NTT and Bell Labs [9][16]. - The technology faced skepticism initially, but advancements in multilayer mirrors capable of reflecting X-rays led to successful demonstrations of soft X-ray lithography [10][12]. - The name "Extreme Ultraviolet Lithography" was adopted in 1993 to distinguish it from earlier X-ray techniques [15]. Group 4: Commercialization and Market Dynamics - Despite initial funding cuts in 1996, Intel continued to invest in EUV technology, forming the EUV-LLC alliance to support research and development [18][19]. - ASML emerged as a key player in the EUV market, gaining access to technology and support from major semiconductor companies like Intel, TSMC, and Samsung [19][23]. - By 2013, ASML delivered its first production EUV equipment, marking a significant milestone in the commercialization of this technology [23].