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臭氧在半导体行业应用
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国林科技:臭氧在半导体行业的应用范围主要包括薄膜沉积等工艺制程
Zheng Quan Ri Bao· 2025-10-27 14:27
Core Viewpoint - The application of ozone in the semiconductor industry includes processes such as film deposition, wet cleaning, surface treatment, and oxide generation, with the company's subsidiary, Guolin Semiconductor, having products that meet these application needs [2] Group 1 - Ozone is utilized in various semiconductor manufacturing processes [2] - Guolin Semiconductor's existing products are capable of fulfilling the application requirements in these processes [2]