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重大国产替代!北京首台套电子束光刻机认定
仪器信息网· 2025-10-15 08:26
Core Viewpoint - Beijing Jinjing Technology's Pharos 310 electron beam lithography machine has received the first major technology equipment certification in Beijing, marking a significant breakthrough in China's high-end lithography equipment sector and reducing reliance on imports [1][2][17]. Group 1: Product Development - The Pharos series electron beam lithography machine is widely used in micro-nano processing and semiconductor device fabrication, which are critical areas for national strategy [4]. - Jinjing Technology has achieved key technological breakthroughs in electron beam exposure processes and core components, with multiple key technical indicators reaching international first-class levels [5]. - The Pharos 310 has successfully passed market verification and has been accepted and put into use by several universities and research institutions, including Tianjin University and the Chinese Academy of Sciences [7]. Group 2: Recognition and Achievements - The Pharos 310 was prominently featured at the Zhongguancun Forum in 2024, garnering widespread attention [13]. - The company has received numerous accolades, including recognition as a National High-tech Enterprise and a National Specialized and New "Little Giant" enterprise [17]. - The successful launch of the Pharos 310 has also led to awards such as the first prize at the "Startup Beijing" Innovation and Entrepreneurship Competition [17]. Group 3: Future Plans - Jinjing Technology aims to continue responding to the national "14th Five-Year Plan" regarding technological innovation and industrial upgrading, enhancing collaboration with universities, research institutions, and enterprises to accelerate the transformation and application of scientific achievements [17].