激光直写光刻设备制造
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国内首发!玉之泉AOD紫外激光直写光刻系统开启微纳加工新范式
仪器信息网· 2025-10-16 09:06
Core Viewpoint - The AOD ultraviolet laser direct writing lithography system launched by Yuzhiquan showcases advanced micro-nano processing capabilities, aiming to lead the international market in this technology [2][20]. Group 1: Outstanding Direct Writing Performance - The AOD system redefines the balance between precision and efficiency in precision processing [3]. - It features ultra-fine processing capabilities with a minimum feature size of 250nm, suitable for complex structures in various applications [4]. - The system includes high stability lithography processes with an automatic focusing range of 100μm, ensuring consistent focus across substrates [11][12]. - It offers flexible adaptability across multiple scenarios with multi-magnification writing heads for on-demand precision and efficiency switching [13]. Group 2: Comprehensive System Features - The AOD system boasts wide compatibility, high controllability, and expandability, with a maximum exposure area of 200×200mm² and temperature stability of ±0.1° [15][17]. - It supports various substrate types, including 9-inch wafers, with thicknesses ranging from 0.1mm to 15mm, accommodating both flexible and rigid substrates [17]. - The system allows for efficient processing modes with multi-channel expansion, enabling diverse processing capabilities [18]. Group 3: Intelligent and Flexible Processing Features - The AOD system provides programming interfaces for custom structure processing, allowing users to exceed standard format limitations [19]. - It supports script-based writing for design freedom, enabling users to generate complex arrays through parameter modifications [25]. Group 4: Broad Application Prospects - In the semiconductor manufacturing sector, the AOD system eliminates the need for masks, significantly reducing development cycles and production costs [21]. - In microfluidics and biomedical fields, it excels in high aspect ratio microchannel processing, meeting stringent requirements for precision medical devices [22]. - The system is capable of processing complex optical structures for micro-optical components and AR/VR devices, facilitating rapid development in consumer electronics [23]. Group 5: Market Position and Competitive Advantage - The successful launch of the AOD system positions Yuzhiquan as a "domestic alternative breaker," filling a technological gap in high-precision micro-nano processing equipment in China [25][26].