微纳加工
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11月首批光刻设备招标信息:三台高精度光刻机集中启动采购
仪器信息网· 2025-11-11 09:06
Group 1 - The 2024 Beijing Science and Technology Awards announced, recognizing 38 scientists and 193 achievements across various categories including outstanding contributions, young talents, and international cooperation awards [1] Group 2 - In November, multiple domestic institutions are initiating the procurement of high-precision lithography equipment, indicating a sustained demand for micro-nano processing capabilities in both research and industry [2] Group 3 - Nanjing University plans to procure a maskless laser direct writing lithography machine with a budget of 1.8 million yuan, aimed at sub-micron patterning on silicon wafers and functional film layers [6] - The Chinese Academy of Sciences High Energy Physics Institute is procuring a two-photon three-dimensional laser direct writing lithography machine with a budget of 1.25 million yuan, focusing on complex three-dimensional device manufacturing [9]
国内首发!玉之泉AOD紫外激光直写光刻系统开启微纳加工新范式
仪器信息网· 2025-10-16 09:06
Core Viewpoint - The AOD ultraviolet laser direct writing lithography system launched by Yuzhiquan showcases advanced micro-nano processing capabilities, aiming to lead the international market in this technology [2][20]. Group 1: Outstanding Direct Writing Performance - The AOD system redefines the balance between precision and efficiency in precision processing [3]. - It features ultra-fine processing capabilities with a minimum feature size of 250nm, suitable for complex structures in various applications [4]. - The system includes high stability lithography processes with an automatic focusing range of 100μm, ensuring consistent focus across substrates [11][12]. - It offers flexible adaptability across multiple scenarios with multi-magnification writing heads for on-demand precision and efficiency switching [13]. Group 2: Comprehensive System Features - The AOD system boasts wide compatibility, high controllability, and expandability, with a maximum exposure area of 200×200mm² and temperature stability of ±0.1° [15][17]. - It supports various substrate types, including 9-inch wafers, with thicknesses ranging from 0.1mm to 15mm, accommodating both flexible and rigid substrates [17]. - The system allows for efficient processing modes with multi-channel expansion, enabling diverse processing capabilities [18]. Group 3: Intelligent and Flexible Processing Features - The AOD system provides programming interfaces for custom structure processing, allowing users to exceed standard format limitations [19]. - It supports script-based writing for design freedom, enabling users to generate complex arrays through parameter modifications [25]. Group 4: Broad Application Prospects - In the semiconductor manufacturing sector, the AOD system eliminates the need for masks, significantly reducing development cycles and production costs [21]. - In microfluidics and biomedical fields, it excels in high aspect ratio microchannel processing, meeting stringent requirements for precision medical devices [22]. - The system is capable of processing complex optical structures for micro-optical components and AR/VR devices, facilitating rapid development in consumer electronics [23]. Group 5: Market Position and Competitive Advantage - The successful launch of the AOD system positions Yuzhiquan as a "domestic alternative breaker," filling a technological gap in high-precision micro-nano processing equipment in China [25][26].
2.55亿元!空天信息大学采购大批仪器设备
仪器信息网· 2025-05-19 08:32
Core Viewpoint - Recently, the Aerospace Information University announced multiple government procurement intentions, with a total budget of 255 million yuan for various instruments and equipment [1][2]. Summary by Relevant Sections Procurement Intentions - The Aerospace Information University has released five procurement intentions for instruments and equipment, with a total budget of 255 million yuan. The expected procurement timeframe is between May and June 2025 [2][4]. Equipment Categories - The procurement includes various types of equipment such as: - Stress testing machines - Non-contact white light interferometers - Wafer thickness gauges - Ellipsometers - Field emission scanning electron microscopes - Step height gauges - Microscopes [2][5]. Specific Projects - The procurement is aimed at supporting the construction of several laboratories, including: - Satellite navigation simulation and enhancement laboratory - Advanced micro-nano processing platform - Key strengthening laboratory for electronic and integrated circuit education and research [4][5]. Budget Allocation - The budget for specific projects includes: - 43 million yuan for satellite navigation simulation and enhancement laboratory equipment - 17 million yuan for key strengthening laboratory equipment - 86 million yuan for advanced micro-nano processing platform equipment - 65 million yuan for high-precision pattern transfer and removal equipment [4][5].