伯东自制质谱仪
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从代理到研发:国产自研质谱仪发布
仪器信息网· 2025-11-25 09:07
Core Viewpoint - BerDong Enterprise (Shanghai) Co., Ltd. has officially launched its self-developed high-performance, compact gas analysis system, the BerDong mass spectrometer, which supports gas analysis in high-end manufacturing and cutting-edge scientific research fields [2][3]. Group 1: Product Features - The mass spectrometer utilizes advanced quadrupole mass filtering technology and electron impact ionization source, ensuring high-quality separation capability and signal stability [4]. - It features a dual detector configuration with Faraday cup and secondary electron multiplier (SEM), covering a wide dynamic range from major to trace components, meeting the needs for ultra-trace impurity detection in semiconductor processes [4]. - The device has a real-time collection rate of up to 1000 readings per second per amu, allowing precise capture of important transient signals in rapid dynamic processes such as ALD/ALE, which is crucial for endpoint detection, reaction mechanism research, process monitoring, and process optimization [4]. Group 2: Technical Specifications - The mass spectrometer operates within a mass range of 1 - 100 / 200 / 300 amu (optional) and employs a compact integrated turbo molecular pump system for its vacuum system [6]. - It supports various communication protocols including EtherCAT, Modbus, and RS232/RS422, ensuring seamless integration with existing equipment [6]. Group 3: Application Scenarios - The instrument is optimized for several key industrial scenarios, including process chamber management, ALD/ALE process monitoring, dry pump management, high-sensitivity leak detection, and gas delivery purity and impurity analysis [6]. - These applications cover rapidly growing industry directions such as leading-edge processes, advanced packaging, new display materials, and ultra-high vacuum systems, providing broader market space for domestic mass spectrometry equipment in critical core equipment fields [7]. Group 4: Company Overview - BerDong Enterprise (Shanghai) Co., Ltd. primarily engages in semiconductor equipment, electronic component processing, sales, and related services, with operational bases in major cities across China [8]. - The company has provided vacuum services to over 10,000 enterprises across various sectors, including industrial, semiconductor, coating, scientific research, and analysis [8].