双光子三维激光直写光刻机
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11月首批光刻设备招标信息:三台高精度光刻机集中启动采购
仪器信息网· 2025-11-11 09:06
Group 1 - The 2024 Beijing Science and Technology Awards announced, recognizing 38 scientists and 193 achievements across various categories including outstanding contributions, young talents, and international cooperation awards [1] Group 2 - In November, multiple domestic institutions are initiating the procurement of high-precision lithography equipment, indicating a sustained demand for micro-nano processing capabilities in both research and industry [2] Group 3 - Nanjing University plans to procure a maskless laser direct writing lithography machine with a budget of 1.8 million yuan, aimed at sub-micron patterning on silicon wafers and functional film layers [6] - The Chinese Academy of Sciences High Energy Physics Institute is procuring a two-photon three-dimensional laser direct writing lithography machine with a budget of 1.25 million yuan, focusing on complex three-dimensional device manufacturing [9]