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基于MEMS技术及玻璃微熔工艺技术的六维力传感器
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安培龙:公司金属应变式六维力传感器已完成开发,且已在部分国内人形机器人及按摩机器人厂商进行了送样
Mei Ri Jing Ji Xin Wen· 2025-08-21 08:04
Group 1 - The company has developed a six-dimensional force sensor using two independent technological paths: metal strain gauge technology and MEMS silicon-based strain gauge + glass micro-fusion process technology [2] - The metal strain six-dimensional force sensor has completed development and is currently undergoing sample testing and validation with some domestic humanoid robot and massage robot manufacturers [2] - The six-dimensional force sensor based on MEMS technology and glass micro-fusion process is still in the research and development stage, with ongoing work on technical parameter adjustments and reliability testing, and no samples have been delivered yet [2]