Core Viewpoint - Shanghai Jiao Tong University has announced procurement intentions for 12 types of scientific instruments and equipment, with a total budget of 106 million yuan, expected to be procured by October 2025 [2][3]. Procurement Overview - The procurement includes various advanced instruments such as electron beam lithography machines, ultra-low noise temperature control systems, ion beam etching equipment, vacuum multi-chamber magnetron sputtering systems, and wet dilution refrigerators [3][4]. - The total budget for these procurements is 106 million yuan, indicating significant investment in research and development capabilities [2][3]. Detailed Procurement List - **Electron Beam Lithography Machine**: 2 units, specifications include resolution ≤50 nm, acceleration voltage 1–100 kV, and spot size ≤16 nm, with a delivery period of 24 months from contract signing [4][5]. - **Ultra-Low Noise Temperature Control System**: 1 unit, with requirements such as equivalent noise density ≤5 nV/√Hz and a cooling power of ≥12 μW at 20 mK, also with a 24-month delivery period [4][5]. - **Ion Beam Etching Equipment**: 1 unit, specifications include ion energy 100–2000 eV and etching rate 1–100 nm/min, with a delivery period of 24 months [4][5]. - **Vacuum Multi-Chamber Magnetron Sputtering System**: 1 unit, requiring vacuum ≤6.7×10^-5 Pa and RF source power ≥500 W, with a 24-month delivery period [4][5]. - **Wet Dilution Refrigerator Scanning Probe Microscope System**: 1 unit, with a minimum temperature of ≤20 mK and a cooling power of 280 μW at 100 mK, also with a 24-month delivery period [6]. Additional Equipment Specifications - **Deep Silicon Etching Equipment**: 1 unit, with etching depth 10–500 µm and aspect ratio >20:1, delivery within 24 months [5]. - **Reactive Ion Etching Equipment**: 2 units, with specifications including working pressure 1 Pa to 10 Pa and etching resolution ≤50 nm, delivery within 24 months [5]. - **Laser Floating Zone Furnace**: 1 unit, with a laser power of 2KW and temperature >2500°C, delivery within 24 months [5]. - **Composite Coating System**: 1 unit, including electron beam evaporation and magnetron sputtering chambers, delivery within 24 months [5]. This procurement initiative reflects a strategic move by Shanghai Jiao Tong University to enhance its research infrastructure and capabilities in advanced materials and nanotechnology.