Workflow
电子混配气
icon
Search documents
昊华科技:公司正在研发的电子混配气主要应用于离子注入、光刻等环节
Zheng Quan Ri Bao· 2026-02-27 13:35
证券日报网2月27日讯 ,昊华科技在接受调研者提问时表示,公司正在研发的电子混配气主要应用于离 子注入、光刻等环节。 (文章来源:证券日报) ...
昊华科技:公司所属昊华气体是国内特种气体行业领先企业
Zheng Quan Ri Bao· 2026-02-09 14:10
Group 1 - The core viewpoint of the article highlights that Haohua Technology is a leading enterprise in the domestic specialty gas industry, with its subsidiary Haohua Gas focusing on the development and production of key specialty gas products [2] - The company has successfully achieved domestic substitution for core specialty gas products such as trifluorine and tungsten hexafluoride through independent research and development [2] - The research and development of electronic mixed gases is primarily applied in ion implantation and photolithography processes [2]