等离子体射频电源
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2025年中国等离子体射频电源系统行业壁垒、市场政策、产业链图谱、市场规模、竞争格局及发展趋势研判:MKS、AE等国际巨头占据主导地位图]
Chan Ye Xin Xi Wang· 2025-09-04 01:37
Core Viewpoint - The plasma RF power supply system industry in China has experienced rapid growth in recent years, supported by national policies, with a projected market size of 12.33 billion yuan in 2024, representing a year-on-year growth of 9.50% [1][10]. Overview - The plasma RF power supply system is a critical specialized power supply system in semiconductor manufacturing, consisting mainly of plasma RF power sources and matching networks. It generates high-frequency electric fields to ionize specific process gases, creating and maintaining high-energy plasma for various semiconductor processes [2][3]. Industry Barriers - The semiconductor equipment core components have high technical barriers due to the increasing complexity of semiconductor processes and chip structures. Manufacturers require high reliability, stability, and consistency from core component suppliers, leading to stringent verification and acceptance standards [3][4]. Policies - The Chinese government has implemented several policies to promote the development of the semiconductor industry, including action plans and guidelines aimed at enhancing the growth of the plasma RF power supply system sector [5]. Industry Chain - The industry chain includes upstream suppliers of electronic components, midstream research and manufacturing of plasma RF power supply systems, and downstream applications in sectors such as semiconductors, photovoltaics, and display panels [6][7]. Market Demand - The semiconductor sector is the largest demand market for plasma RF power supply systems in China, accounting for over 50% of the market. The semiconductor equipment market in China is projected to exceed 45 billion USD in 2024, indicating significant growth potential for plasma RF power supply systems [8][9]. Current Development - The global plasma RF power supply system market is expected to reach 5.5 billion USD in 2024, with a year-on-year growth of 10.22%. The increasing complexity of semiconductor processes drives demand for advanced plasma RF power supply systems [10][11]. Competitive Landscape - The plasma RF power supply system market is characterized by high technical barriers and low domestic production rates in China. Major international players dominate the market, while domestic companies like Sichuan Yingjie Electric and Shenzhen Hengyun Chang Vacuum Technology are making strides in production and technology [11][12]. Domestic Company Analysis - Sichuan Yingjie Electric focuses on power electronics technology and has made significant investments in semiconductor power supply technologies, achieving mass production for advanced processes [13]. Shenzhen Hengyun Chang Vacuum Technology specializes in plasma RF power supply systems and has developed a comprehensive product matrix for semiconductor applications [14]. Future Trends - The domestic market for plasma RF power supply systems is expected to grow as local semiconductor manufacturers increasingly seek self-sufficiency in components. Companies like Shenzhen Hengyun Chang are positioned to expand their market share as they meet the technical requirements of semiconductor equipment manufacturers [15][16].