Core Insights - Tsinghua University has announced procurement intentions for 18 types of instruments and equipment, with a total budget of 136 million yuan, scheduled for January 2026 [1][2]. Procurement Overview - The procurement includes various advanced technologies such as: - Plasma Enhanced Chemical Vapor Deposition (PECVD) system with a budget of 2.7 million yuan [4] - Inductively Coupled Plasma Enhanced Chemical Vapor Deposition (ICP-CVD) system with a budget of 3 million yuan [4] - High-Density Plasma Chemical Vapor Deposition (HDPCVD) system with a budget of 24 million yuan [4] - Atomic Layer Deposition (ALD) system with a budget of 9 million yuan [4] - Ion Implanter with a budget of 20 million yuan [4] - Other equipment includes vacuum annealing systems, electron beam evaporators, and various testing instruments [5]. Detailed Equipment List - The detailed procurement list includes: - Directional Magnetization Vacuum Annealing System: 4 million yuan [4] - General Electron Beam Evaporator: 4 million yuan [4] - New Material Etching Machine: 5 million yuan [5] - Scanning Electron Microscope: 5 million yuan [5] - Hall Effect Tester: 2.9 million yuan [5] - Critical Dimension Measurement System: 7 million yuan [5] - Electron Beam Lithography System: 30 million yuan [5].