Workflow
Aspen三代产品系列等离子体射频电源系统
icon
Search documents
恒运昌:公司先后推出CSL、Bestda、Aspen三代产品系列等离子体射频电源系统
Zheng Quan Ri Bao Wang· 2026-03-11 13:40
Core Viewpoint - The company has successfully broken the long-standing monopoly of two major American companies in the domestic market for plasma radio frequency power systems, launching three generations of products over the past decade [1] Group 1: Product Development - The company has introduced the CSL, Bestda, and Aspen series of plasma radio frequency power systems, filling a domestic gap in the market [1] - The company has initiated research and development for the localization of core components of semiconductor equipment, including quality flow meters [1] Group 2: Supply Chain Localization - Since 2021, the company has made significant progress in the localization of upstream procurement, achieving domestic application of vacuum capacitors, ceramic capacitors, MCUs, SiCMOS, LDMOS, and some ADCs and FPGAs [1] - The company has established a comprehensive plan for the full localization of upstream components and will continue to advance the verification of component localization [1]