Preforma Uniflash®金属栅系列
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多款重磅展品“炸场”!这场半导体盛会干货满满
Shang Hai Zheng Quan Bao· 2025-09-06 05:50
Core Insights - The 13th China Semiconductor Equipment Annual Conference and Exhibition (CSEAC 2025) was held from September 4 to 6, focusing on the theme "Strengthening China's Chip, Embracing the Chip World" [1] - The event showcased the latest R&D achievements and innovations in semiconductor key equipment, supporting equipment, core components, and emerging materials [1] - The conference serves as a bridge for collaboration between domestic semiconductor equipment manufacturers and manufacturing enterprises, creating opportunities for domestic products to enter global supply chains [1] Industry Developments - Numerous companies presented core products, with Zhongwei Company launching six new semiconductor equipment products covering critical process areas such as plasma etching, atomic layer deposition (ALD), and epitaxy [3] - New products include the Primo UD-RIE® for high aspect ratio etching and the Primo Menova 12-inch ICP etching equipment focused on metal etching [3] - The exhibition attracted significant attention, with companies like Xinkailai showcasing various series of equipment, including detection and etching tools [5][7] Market Trends - The semiconductor equipment sector is experiencing a surge in demand due to the ongoing expansion of wafer fabrication plants [12] - According to SEMI, global semiconductor manufacturing equipment sales are projected to reach a record $125.5 billion in 2025, representing a 7.4% year-over-year increase [13] - The domestic semiconductor equipment manufacturers are accelerating product R&D and technological iterations, with companies like Zhongwei reporting a significant reduction in new equipment development cycles from 3-5 years to as short as 2 years [13] Educational and Talent Development - The event featured a "Talent Matching and Industry-Academia Integration" section, where 30 universities showcased research projects, and over 100 companies participated in recruitment activities [8][10] - This initiative aims to promote the integration of academic research outcomes with industry needs, enhancing collaboration between educational institutions and the semiconductor industry [10]
中微公司:公司近日推出六款半导体设备新产品
Ju Chao Zi Xun· 2025-09-04 13:33
Core Viewpoint - The company has launched six new semiconductor equipment products, enhancing its capabilities in plasma etching, atomic layer deposition, and epitaxy, which supports its transformation into a high-end equipment platform company [2][6]. Group 1: Plasma Etching Technology - The company introduced two new products in the plasma etching sector, providing advanced and efficient solutions for high aspect ratio etching and metal etching [3]. - The new CCP capacitive high-energy plasma etching machine, PrimoUD-RIE®, features six single reaction chamber designs and offers higher ion bombardment energy, meeting stringent requirements for high aspect ratio etching while improving etching precision and production efficiency [3]. - Innovations in PrimoUD-RIE® include a dynamic edge impedance adjustment system that enhances the verticality of edge deep hole etching, significantly increasing the yield at the wafer edges [3]. Group 2: Metal Etching Equipment - The Primo Menova™ 12-inch ICP single-chamber etching equipment specializes in metal etching, particularly for Al lines and blocks, and is essential for the metallization process in wafer fabrication [4]. - This equipment excels in etching uniformity control, achieving high rates, high selectivity, and low substrate damage, while its efficient chamber cleaning process reduces contamination and extends operational time [4]. Group 3: Thin Film Deposition Technology - The company launched four new products in thin film deposition, including three atomic layer deposition products and one epitaxy product [5]. - The PreformaUniflash® metal gate series, which includes TiN, TiAl, and TaN products, meets the application needs for advanced logic and storage devices [5]. - This series features a unique dual reaction chamber design that allows for flexible configuration and achieves industry-leading production efficiency, along with advanced capabilities in film uniformity and contaminant control [5]. Group 4: Epitaxy Equipment - The PRIMIOEpita®RP, a dual-chamber reduced pressure epitaxy device, is noted for its compact design and flexibility, allowing for up to six reaction chambers [6]. - This equipment significantly reduces production costs and chemical consumption while maintaining high production efficiency, with advanced gas control and temperature regulation capabilities [6]. - The device is adaptable for various epitaxy processes across different semiconductor technologies, supporting the industry's shift towards more advanced nodes [6].