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自主HHG技术让国产EUV光源破局启航
Guan Cha Zhe Wang· 2025-11-16 01:22
Core Insights - The event "Chip Chasing Shenwan: Becoming the Future" showcased advancements in extreme ultraviolet (EUV) light source and high harmonic generation (HHG) technology by Hefei Haoyu Xinguang Technology Co., Ltd. [1][2] - The company aims to become a world leader in advanced laser application technology, focusing on innovation and industry progress [4]. Company Overview - Hefei Haoyu Xinguang was established in 2023, specializing in advanced laser application technology and semiconductor measurement core technology, with headquarters in Hefei and branches in major cities [4]. - The team comprises national-level overseas talents and industry experts from cutting-edge fields [4]. Technology Focus - HHG is the core technology of the company, offering a compact, cost-effective alternative to traditional EUV light sources [5]. - HHG technology generates high harmonics through the interaction of femtosecond lasers with rare gases, producing EUV light in the 10-50 nanometer range [5]. Market Applications - HHG technology is being adopted in various sectors, including semiconductor manufacturing, chip research, and nanodevice testing [4][5]. - The global photomask defect detection market is projected to grow from approximately 12.8 billion RMB in 2024 to 23.8 billion RMB by 2030, with China expected to account for 35%-40% of this market [9]. - The overlay measurement market is estimated to reach 1.5 billion USD by 2030, up from 1.2 billion USD in 2023 [12]. Research and Development - The company is developing a desktop-level HHG system to democratize access to high-quality EUV light sources for research, reducing costs and increasing availability for scientists [15][16]. - The HHG technology allows for non-contact, non-destructive testing with high resolution, capable of identifying defects smaller than 5 nanometers [13]. Future Vision - The company aims to break the technological monopoly in the EUV light source field, transitioning from large scientific installations to lab-usable equipment [19]. - The goal is to integrate complex scientific principles into replicable engineering solutions, supporting the semiconductor industry and advanced manufacturing in China [19][20].