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全国首台国产商业电子束光刻机在杭州“出炉”
财联社· 2025-08-14 01:35
Core Viewpoint - The article highlights the successful application testing of China's first domestically produced commercial electron beam lithography machine, "Xizhi," which signifies a major advancement in quantum chip research and development, providing a "Chinese knife" for the industry [1]. Group 1: Product Development - The "Xizhi" machine has entered application testing and is designed for quantum chip and new semiconductor research, showcasing precision comparable to international mainstream equipment [1]. - The machine operates with a precision of 0.6nm and a line width of 8nm, allowing for flexible design modifications without the need for a mask, making it particularly suitable for the initial stages of chip development [1]. Group 2: Technological Significance - The development of "Xizhi" represents a significant leap in the ability to create intricate circuit designs on silicon substrates using high-energy electron beams, likened to a "nano brush" that can intricately "paint" circuits on chips [1]. - The project is backed by a provincial key laboratory, indicating strong institutional support for advancing semiconductor technology in China [1].