Core Viewpoint - The article discusses the process of generating a Process Design Kit (PDK) for digital standard cell libraries, emphasizing the importance of accurate modeling and design rules in semiconductor manufacturing [1][9]. Group 1: PDK Generation Process - The first step in PDK generation is defining the Back End of Line (BEOL) stacking structure, which includes the number of metal and via layers, conductor and dielectric materials, and the geometries suitable for the technology node [1]. - After defining the BEOL structure, electrical characteristics for each layer are simulated, and results are recorded in BEOL parasitic parameter files [1]. - The next critical step in PDK development involves designing and developing N-channel and P-channel FET device models, which form the foundation of the standard cell library [1]. Group 2: Design Rules and Layout - Design rules for minimum metal lengths, spacing between metal/via, and end-to-end spacing are documented in technology files (.tf) or Layout Exchange Format (LEF) files [2][3]. - The layout design of standard cells is compact, limiting internal wiring to lower BEOL layers (typically M1-M3) and middle interconnect layers (MOL) [7]. - A layout versus schematic (LVS) check is performed after layout completion to ensure the layout matches the schematic and adheres to design rules [7]. Group 3: Device Simulation and Characterization - Device characteristics are simulated using TCAD tools, with DC and AC characteristics characterized through various models, including BSIM [5]. - As technology nodes shrink, transistor architectures have evolved, with FinFET and GAAFET structures requiring specific BSIM-CMG templates for accurate modeling [5]. - The final step involves developing a standard cell library that includes circuit schematics for each cell, which is essential for layout and simulation [5]. Group 4: Parasitic Parameter Extraction - Parasitic parameter extraction captures MOL and lower BEOL layers, represented as RC SPICE netlists, which are crucial for performance evaluation during layout simulations [8]. - The information generated from these netlists is stored in Liberty (.lib) files, aiding EDA tools in assessing design performance during module layout and routing simulations [8]. - Accurate parasitic modeling and standard cell characterization are vital for reliable timing and power analysis in digital integrated circuit design [9].