Core Viewpoint - The performance and chemical purity of quartz glass are closely related, influenced by raw materials and preparation processes, leading to various defects that can affect product quality [1] Defects in Quartz Glass - Common macro defects in quartz glass include bubbles, inclusions, stripes, and cracks due to thermal stress, primarily caused by impure raw materials or improper manufacturing processes [2] - Structural defects arise from impurities in the Si-O atomic network, mainly metal impurities and hydroxyl groups, which can affect chemical stability and optical properties, particularly in semiconductor applications [3] Methods to Reduce Defects - High-temperature homogenization can improve or eliminate internal bubbles, stripes, and particles in quartz glass, with parameters like temperature, pressure, and homogenization time being crucial for enhancing material uniformity and stability [4] - Annealing is essential for reducing residual stress in quartz glass, with factors such as annealing temperature, heating and cooling rates, and holding time significantly impacting stress removal [5] - Hydroxyl groups, primarily from electric melting and hydrogen-oxygen flame processes, can be effectively reduced through vacuum conditions, improving the quality of quartz products [6]