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打造下一代3D DRAM
半导体行业观察· 2025-08-25 01:46
Core Viewpoint - The research conducted by IMEC and Ghent University represents a significant advancement towards 3D DRAM technology, achieved by alternating the growth of 120 layers of silicon and silicon-germanium on 300mm wafers, overcoming challenges related to lattice mismatch and defect management [2][4][6] Group 1: Technical Achievements - The team successfully adjusted the germanium content in silicon-germanium layers and introduced carbon to alleviate stress, ensuring uniform temperature during deposition to prevent defects [2][4] - The advanced epitaxial deposition technique allows for precise control over the thickness, composition, and uniformity of each layer, which is crucial for maintaining structural integrity in the stacked configuration [4][6] Group 2: Implications for Memory Technology - Traditional DRAM's planar layout limits density, while vertical stacking (3D) enables more storage units in the same footprint, enhancing storage capacity without increasing chip size [4][6] - The successful construction of 120-layer structures indicates that vertical scaling is feasible, bringing the industry closer to next-generation high-density storage devices [4][6] Group 3: Broader Impact on Semiconductor Industry - The precise multi-layer growth technology could advance the development of 3D transistors, stacked logic devices, and even quantum computing architectures, where atomic-level control of layer characteristics is essential [6] - This research aligns with ongoing developments in Gate-All-Around Field Effect Transistors (GAAFET) and Complementary Field Effect Transistors (CFET), which benefit from the precise material control enabled by epitaxial growth techniques [6]