峨眉山系列EPI设备
Search documents
意想不到的惊喜?新凯来:中国半导体设备的“破局者”如何跨越万重山?
材料汇· 2025-10-14 14:16
Core Viewpoint - The article discusses the upcoming 2025 Bay Area Semiconductor Chip Exhibition in Shenzhen, highlighting the participation of local semiconductor company Xinkailai and the potential surprises it may unveil, particularly in advanced semiconductor manufacturing technologies [2][3][4]. Group 1: Event Overview - The 2025 Bay Area Semiconductor Chip Exhibition will take place from October 15 to 17 at the Shenzhen Futian Convention Center [2][3]. - Xinkailai is expected to showcase significant advancements, including a new generation of ultra-fast real-time oscilloscopes with a performance improvement of 500% [4]. Group 2: Potential Surprises from Xinkailai - Surprise One: Breakthrough in domestic DUV lithography machine components, specifically the light source or high-NA lens system, which are critical for advanced lithography technology [6][7]. - Surprise Two: A complete set of domestically produced core equipment for 28nm and above processes, demonstrating a systematic breakthrough in semiconductor manufacturing capabilities [7]. - Surprise Three: Revolutionary software or intelligent process control platforms that significantly enhance performance on existing lithography equipment, potentially achieving near 7nm process yields [9]. Group 3: Xinkailai's Technological Innovations - Xinkailai's "Mountains Series" equipment matrix, which includes various advanced semiconductor manufacturing tools, aims to break international monopolies and achieve precision from microns to nanometers [20][23]. - The Emei Mountain series focuses on atomic-level precision in epitaxial deposition, achieving significant advancements in material preparation for semiconductor manufacturing [27][29]. - The Sanqing Mountain series offers rapid thermal processing (RTP) solutions with millisecond temperature response and nanometer-level uniformity, enhancing thermal budget management in advanced processes [32][40]. Group 4: Equipment and Capabilities - The Wuyi Mountain series provides a complete etching solution for 12-inch wafers, achieving nanometer-level precision and competing with international leaders [44][51]. - The Putuo Mountain series focuses on physical vapor deposition (PVD) with millimeter-level positioning accuracy and atomic-level film control, establishing a strong presence in metal interconnect processes [55][58]. - The Alishan series of atomic layer deposition (ALD) equipment achieves 0.1Å film thickness control, significantly enhancing material growth rules in advanced semiconductor manufacturing [62][65].