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 国产开管X-ray设备实现创新突破 赋能芯片检测降本提质
 Xin Hua Cai Jing· 2025-10-16 08:00
 Core Insights - Wuxi High-tech Zone has significantly increased investment in chip research and development, focusing on overcoming critical "bottleneck" technologies [1] - Rilian Technology Group has successfully developed China's first open-tube X-ray source, enabling nanometer-level resolution detection of high-density integrated circuits and third-generation semiconductor internal structural defects [1][2] - The open-tube X-ray source is a key quality control tool for the semiconductor manufacturing industry, supporting the trend towards smaller, more complex, and integrated designs [1]   Company Developments - Rilian Technology's self-developed 160kV open micro-focus X-ray source has achieved standardized production processes, allowing for mass production of its AX9600 semiconductor intelligent inspection equipment [2] - The AX9600 equipment captures 0.8μm-level defects and provides nanometer-level imaging, ensuring a closed-loop quality control process for semiconductor packaging defects [2] - The deployment of this equipment in advanced production bases has significantly improved detection accuracy and reduced reliance on imported high-end detection equipment, enhancing the market share of domestic devices [2]   Industry Context - Rilian Technology is recognized as a leading player in the industrial inspection field, competing globally and reshaping the industry landscape [3] - According to a recent Frost & Sullivan report, Rilian Technology is part of the "GUN" group alongside GE and Nordson, noted for its comprehensive service capabilities in industrial X-ray detection [3] - Wuxi High-tech Zone is optimizing its business environment and has introduced several policies to support the development of the integrated circuit industry, aiming to accelerate the domestic replacement of key technologies [3]