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光电子核心器件,国产重磅突破
半导体芯闻· 2025-06-09 10:34
Core Viewpoint - The Shanghai Jiao Tong University Wuxi Photonic Chip Research Institute (CHIPX) has achieved a significant milestone by successfully producing the first 6-inch thin-film lithium niobate photonic chip wafer, marking a historic leap from "technology following" to "industry leading" in China's high-end optoelectronic core devices sector [2][4][12]. Group 1: Technological Breakthroughs - The establishment of the photonic chip pilot line addresses the critical issue of mass production of optical quantum technology, which has previously faced challenges due to the lack of common key process technology platforms [4][6]. - The pilot line integrates over 110 top-tier CMOS process equipment, covering the entire closed-loop process from photolithography to packaging, achieving breakthroughs in wafer-level photonic chip integration technology [6][9]. - The research team has developed a combination process of deep ultraviolet (DUV) lithography and thin-film etching, achieving high-precision waveguide etching of 110nm on 6-inch lithium niobate wafers [7][9]. Group 2: Performance and Production Capacity - The thin-film lithium niobate modulator chip has achieved mass production capabilities, with a production capacity of 12,000 wafers per year, providing low-cost, rapid iteration, and scalable production solutions for industry partners [9][11]. - Key performance indicators include a modulation bandwidth exceeding 110GHz, insertion loss below 3.5dB, waveguide loss under 0.2dB/cm, and a modulation efficiency of 1.9 V·cm, significantly enhancing optical transmission efficiency [9][11]. Group 3: Ecosystem Development - The research institute is creating an open and shared service ecosystem, providing a comprehensive service system from concept design to mass production, significantly shortening the R&D cycle [11][12]. - The institute plans to release a Process Design Kit (PDK) that integrates core process parameters and device models, facilitating standardized photonic chip design [9][11]. Group 4: Strategic Implications - The advancements in thin-film lithium niobate photonic chips are positioned to support the growing demands of AI computing, cloud computing, and 5G/6G infrastructure, addressing the limitations of traditional electronic devices [14][15]. - The research institute aims to build the world's largest photonic chip industry base, focusing on technology transfer and incubation for industries such as quantum information, 6G communication, and laser radar [15].