高纯石英基板
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龙图光罩:公司将积极稳妥地推进合格国产基板的验证与导入工作
Zheng Quan Ri Bao Wang· 2026-01-29 13:12
Core Viewpoint - The company emphasizes the existing gaps in domestic high-purity quartz substrates for advanced photomasks, particularly in material purity, defect density, surface flatness, and thermal expansion coefficient stability, which directly affect photomask precision and yield [1] Group 1 - The main indicators of the gap in high-purity quartz substrates are material purity, defect density, surface flatness, and thermal expansion coefficient stability [1] - The root cause of these gaps lies in the accumulation of core technologies related to high-purity synthesis and ultra-precision processing [1] - The company supports breakthroughs in domestic high-end substrate technology and plans to actively and steadily promote the verification and introduction of qualified domestic substrates, provided that related products can continuously meet process stability and yield requirements [1]