12英寸原子层沉积产品Preforma Uniflash金属栅系列
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中微公司发布六款半导体设备新产品
Zheng Quan Shi Bao Wang· 2025-09-04 06:12
Core Viewpoint - On September 4, during the 13th Semiconductor Equipment and Core Components and Materials Exhibition (CSEAC2025), the company announced the launch of six new semiconductor equipment products, highlighting its commitment to innovation in the semiconductor industry [1] Group 1: New Product Launch - The new products cover key processes such as plasma etching (Etch), atomic layer deposition (ALD), and epitaxy (EPI) [1] - A standout product is the 12-inch atomic layer deposition product, Preforma Uniflash metal gate series, which is a significant highlight in the thin film deposition field [1] - The Preforma Uniflash series includes three major products designed to meet the application needs of advanced logic and advanced memory devices in metal gate technology [1]