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盛美上海:2025年公司立式炉管、Track以及PECVD设备等平台化产品已陆续投放市场
Zheng Quan Ri Bao Wang· 2026-01-29 13:41
Core Viewpoint - The company anticipates that its platform products, including vertical furnace tubes, Track, and PECVD equipment, will contribute significantly to overall revenue starting in 2026, marking them as key growth drivers for the future [1] Group 1: Product Development and Market Launch - The company plans to launch its first self-developed high-output (300WPH) KrF process front-end coating and developing (Track) equipment, UltraLITHKrF, in Q3 2025, which has already been successfully delivered to a leading logic wafer factory in China [1] - The UltraLITHKrF product features high capacity, advanced temperature control technology, and real-time process control and monitoring capabilities, expanding the applications related to photolithography [1] Group 2: PECVD Equipment and R&D Investment - The company expresses strong confidence in the differentiated technological framework and future market prospects of PECVD equipment, with plans to increase R&D investment to expand its market presence domestically and internationally [1] - Continuous technological advancements are being made in LPCVD and ALD furnace series equipment, achieving innovative breakthroughs [1] Group 3: Innovations in Vertical Furnace and ALD Equipment - The company's self-developed UltraFn vertical furnace equipment features a unique vertical structure design with a processing capability of up to 1250°C, focusing on high-end IGBT applications, receiving positive market feedback [1] - Future product goals include achieving a processing capability of 1350°C, which is expected to be a significant benefit for IGBT applications [1] - The company has been strengthening its R&D investment in ALD equipment, accumulating a series of self-developed patented technologies with global intellectual property protection, aiming for further contributions in uniformity and material aspects [1]