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俄罗斯的光刻机往事
半导体行业观察· 2025-08-20 01:08
Core Viewpoint - The article discusses the historical context and current status of Planar (KB-TEM), a Belarusian semiconductor equipment manufacturer, highlighting its significance in the semiconductor industry and the challenges it faces in a competitive landscape. Group 1: Historical Background - The Soviet Union made significant contributions to semiconductor technology, including the development of contact lithography machines, but lagged behind Western advancements [7][10]. - Planar, established in 1963, became a key player in the Soviet semiconductor industry, focusing on lithography equipment and precision instruments [4][5]. - After the dissolution of the Soviet Union, Planar transitioned to a market-oriented operation while maintaining its technological heritage [4][5]. Group 2: Technological Development - Planar's core advantage lies in its low-cost, high-reliability semiconductor manufacturing equipment, which is widely used in research institutions in Russia and Belarus [5]. - The company has developed competitive technologies in contact and proximity lithography, although it has not kept pace with advancements made by companies like ASML and Nikon [5][10]. - Planar's laser direct-write lithography machines are utilized for research and small-scale chip production, providing an alternative to traditional lithography methods [14]. Group 3: Market Position and Challenges - Planar's lithography equipment is considered one of the few "advanced" options available to countries in the CIS region, despite being outdated compared to global standards [10][14]. - The company faces increasing competition as geopolitical dynamics shift, with both China and Russia striving for independent semiconductor manufacturing capabilities [14][19]. - Planar's efforts to market its products, such as participating in trade shows, have not yet translated into a strong competitive position against more established players like V-Technology [19].
俄罗斯首台350nm光刻机,即将量产
半导体行业观察· 2025-03-30 02:56
如果您希望可以时常见面,欢迎标星收藏哦~ 来源:内容来自 tomshardware,谢谢。 泽列诺格勒纳米技术中心 (ZNTC) 和 Planar已完成俄罗斯首台支持 350nm 级工艺技术(0.35 微 米)的光刻系统的开发。白俄罗斯 Planar 公司协助完成了这一开发。该机器已通过官方检查,正在 泽列诺格勒进行集成试验。尽管具有象征意义,但该系统的设计已经过时了几十年,ZNTC 能否批 量生产尚不清楚。 新工具 ZNTC 光刻设备于一年前正式推出,是一款基于固态激光器的 200 毫米光刻机,曝光场大小为 22 毫米 × 22 毫米(484 平方毫米)。ZNTC 和 Planar 并未透露有关该设备的关键技术细节,包括其 使用的激光器波长或激光器可发射的功率。不过,该公司表示,其使用节能的"固态"激光器,具 有"更窄"的发射范围和更长的使用寿命。 固态光源的使用似乎是一个重要的细节,它不仅将该工具与领先的晶圆厂工具制造商设计的工具区 分开来,而且还可以暗示该公司未来的计划。 考虑到 ZNTC 发布的声明相当模糊(也许是为了保密其进展及其合作伙伴的进展),研究 ASML 所谓的最知名的生产工具以了解 ZNT ...