Core Viewpoint - The article provides a comprehensive overview of the evolution of lithography technology from the 1950s to the 21st century, focusing on the advancements in extreme ultraviolet lithography (EUVL) and its significance in semiconductor manufacturing [2][6]. Group 1: Introduction to Lithography Technology - Lithography technology is the cornerstone of modern microelectronics, enabling the precise transfer of complex patterns onto substrates, which directly impacts the integration density, computational performance, and manufacturing costs of integrated circuits [7]. - The application scenarios of lithography technology have expanded from traditional fields such as consumer electronics and medical devices to emerging areas like artificial intelligence and quantum computing, which require high-performance chips [8][9]. Group 2: Overview of Lithography Technology - The basic process of lithography includes substrate preparation, photoresist coating, pre-baking, exposure, development, post-baking, etching, and stripping [10][11]. - Key lithography technologies include deep ultraviolet lithography (DUVL), electron beam lithography (EBL), and nanoimprint lithography (NIL), each with unique characteristics and applications [10][11]. Group 3: Photoresist Materials - Photoresists are sensitive materials used in lithography, classified into positive and negative types based on their behavior after development [12][13]. - The core components of photoresists include film-forming resins and photoinitiators, which play crucial roles in the lithography process [12][13]. Group 4: Development Trends and Challenges - The future of photoresist development focuses on high-resolution materials compatible with EUVL, environmentally friendly options, and multifunctional photoresists that integrate various properties [15][16]. - Key challenges in lithography technology include resolution limits, high costs, and environmental impacts, with ongoing research aimed at addressing these issues through innovative solutions [22][23][24]. Group 5: Summary and Outlook - The evolution of lithography technology has progressed from DUVL to EUVL, achieving mass production capabilities for 5nm and below process nodes, while new types of photoresists are being developed to meet advanced manufacturing needs [16][33]. - Future directions include interdisciplinary collaboration, intelligent lithography systems, and the integration of multifunctional materials to adapt to emerging technologies [16][33].