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寻找铜互联的替代者
半导体行业观察· 2025-11-17 01:26
Core Viewpoint - The semiconductor industry is facing challenges in improving the performance of integrated circuits as transistor sizes shrink to the nanoscale, necessitating the development of new interconnect materials to overcome the bottleneck caused by RC time delay in interconnect lines [1][2]. Group 1: Transistor and Interconnect Challenges - The continuous reduction in transistor size, following Moore's Law, has led to an increase in the number of transistors on microchips, enhancing processing speed [1]. - As transistor sizes approach the nanoscale, interconnect lines become the primary bottleneck for processing speed, requiring innovative materials beyond just smaller transistors [1][2]. - The RC time delay in interconnect lines, which is significantly affected by the material's resistance and capacitance, can be up to 20 times the switching speed of transistors when using current materials like copper [2]. Group 2: Material Properties and Alternatives - Copper has been the standard material for interconnects due to its excellent conductivity, but its resistance increases as the size decreases, leading to longer RC time delays [2][3]. - The electron mean free path in copper at room temperature is approximately 40 nm, and when interconnect widths fall below this threshold, increased electron scattering occurs, raising resistance [3]. - The semiconductor industry is exploring alternative materials with electron mean free paths smaller than copper, such as ruthenium, to optimize interconnect performance [7]. Group 3: Topological Semimetals - Topological semimetals are emerging as promising materials due to their unique electronic properties, which can significantly alter electron transport behavior [8]. - Certain topological semimetals, like Weyl and chiral semimetals, exhibit robust surface electronic states that are not present in traditional metals like copper, potentially leading to lower resistance as dimensions decrease [8]. - Research indicates that over 50% of known crystalline compounds could be topological, providing a vast design space for interconnect applications [8]. Group 4: Potential Candidates and Performance - Compounds such as niobium arsenide and niobium phosphide have shown potential as interconnect materials, with niobium arsenide exhibiting a resistivity of about 1 to 3 microohm·cm at room temperature, which is significantly lower than that of single-crystal copper [9]. - Molybdenum phosphide and cobalt silicide also demonstrate favorable resistivity characteristics, with molybdenum phosphide showing resistance independent of size [9]. - The line resistance of topological semimetals needs further evaluation to accurately predict their performance in integrated circuits [9]. Group 5: Research and Development Challenges - The study of topological semimetals is still in its early stages, with many materials yet to be explored for their size-dependent resistivity [10]. - Experimental investigations into the electron transport behavior of these materials are crucial for understanding their stability under manufacturing conditions [10]. - The transition from laboratory-scale measurements to large-scale industrial production requires a comprehensive understanding of material properties beyond just transport behavior [12].