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半导体合成石英材料国产化进程与竞争格局:谁在制造光刻机的“瞳孔”?
材料汇· 2025-10-19 13:48
Core Application and Market Position - Synthetic quartz materials are essential in the semiconductor industry, directly impacting chip manufacturing precision and yield [2] - In semiconductor manufacturing, synthetic quartz plays an irreplaceable role in three key areas due to its excellent optical properties, low thermal expansion coefficient, and outstanding chemical stability [4][6] - The global market for photomask substrates, which utilize synthetic quartz, is approximately $5-6 billion, with the Chinese market reaching 10 billion RMB, accounting for one-third of the global share [10] Technical Characteristics and Cost Structure - Synthetic quartz must meet extreme technical specifications, including a transmittance of over 99.5% at 193nm wavelength and a low thermal expansion coefficient below 5×10⁻⁷ /℃ [14][15] - The cost structure analysis reveals that advanced lithography machines consume 500 kg to 2 tons of synthetic quartz, leading to raw material costs of 750,000 to 3 million RMB per machine [16] - The material loss rate during processing is high, ranging from 25% to 33%, significantly affecting the cost structure of semiconductor equipment [16] Global Landscape and Domestic Production Status - The global synthetic quartz market is characterized by an oligopolistic structure, with four companies controlling over 80% of the high-end market share [21] - The domestic production rate for synthetic quartz materials is approximately 20%, with significant variations across different segments [22] - In high-end sectors, such as DUV and EUV lithography, domestic production has not yet achieved scale, relying heavily on imports [23] Competitor Analysis - International giants like Heraeus, Tokuyama, and Corning have established strong technical advantages in synthetic quartz, with unique strengths in product uniformity and defect control [26][27] - Domestic leaders like Feilihua and Shenguang are making strides in the market, with Feilihua holding about 25% of the domestic photomask market [28] Domestic Production Progress and Future Outlook - The domestic synthetic quartz material production is accelerating due to policy and market drivers, with significant support from national technology initiatives [32] - Different fields show varied progress in domestic production, with the optical inspection equipment sector seeing rapid growth [33] - Future projections indicate a potential increase in domestic production rates for mature processes from 50% to over 80%, while high-end materials for DUV lithography may rise to around 30% [34]