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EUV光刻,重磅突破,全球首次
半导体行业观察· 2025-12-10 01:50
Core Viewpoint - The article discusses the successful demonstration of wafer-scale fabrication of solid-state nanopores using extreme ultraviolet (EUV) lithography technology by imec, marking a significant step towards low-cost mass production in the molecular sensing field [2][3]. Group 1: Technology and Innovation - imec has successfully created highly uniform nanopores with diameters as small as approximately 10nm on a 300mm wafer, combining EUV lithography with etching techniques to achieve nanoscale precision and repeatability [3]. - Solid-state nanopores, etched in silicon nitride membranes, allow for single-molecule detection by generating real-time analyzable electrical signals when immersed in liquid and connected to electrodes [2][3]. - The technology overcomes limitations faced by biological nanopores, such as stability and integration, making solid-state nanopores ideal for scalable, high-throughput sensing applications [2][3]. Group 2: Applications and Future Prospects - The advancements in EUV nanopore technology are expected to enable rapid diagnostics, personalized medicine, and molecular fingerprinting [4]. - imec is developing a modular readout system with scalable fluid control technology to provide a platform for chemical development related to these applications [4]. - A paper on a 256-channel event-driven readout for solid-state nanopore single-molecule sensing will be presented at the 2026 IEEE International Solid-State Circuits Conference (ISSCC), showcasing imec's concept validation ASIC readout [4].