电感耦合等离子刻蚀机
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3.96亿元!多个单位采购大批仪器
仪器信息网· 2025-12-08 09:07
Core Insights - The article discusses the recent announcement by zycgr regarding 14 procurement intentions for scientific instruments, with a total budget of 396 million yuan [2][3]. Procurement Overview - The procurement includes various advanced instruments such as inductively coupled plasma etching machines, non-destructive global film thickness testing systems, multi-chamber deep silicon etching machines, and high-vacuum high-speed deposition systems [3][4]. - The expected procurement date is set for December 2025 [3]. Detailed Procurement List - The procurement list includes: - Dilution refrigerator: 700,000 yuan, requiring at least one year of warranty and lifetime technical support [5]. - Arbitrary waveform generator: 1.1 million yuan, with specifications including 4-channel output and a sampling rate of 10 GSa/s [5]. - High-vacuum high-speed deposition system: 2 million yuan, with a vacuum requirement of less than 5e-8 Torr [5]. - Inductively coupled plasma etching machine: 46.16 million yuan, for etching ion traps and quantum materials [5]. - Non-destructive global film thickness testing system: 1.5 million yuan, for testing film thickness distribution on 12-inch wafers [6]. - Multi-chamber deep silicon etching machine: 18 million yuan, for advanced packaging TSV hole etching [6]. - Fully automatic uniform coating and developing system: 32 million yuan, for automated coating and developing processes [6]. - Automated robot wafer transfer and workflow monitoring system: 100 million yuan, aimed at improving process efficiency [6]. - Ultra-stable lasers and other specialized laser systems with various specifications and budgets ranging from 143,000 to 238,000 yuan [6]. Conclusion - The procurement intentions reflect a significant investment in advanced scientific instruments, indicating a focus on enhancing research capabilities and technological advancements in the relevant fields [2][3].
预算1.81亿元!zycgr采购大批仪器
仪器信息网· 2025-04-04 10:22
导读: 近日,zycgr发布多批政府采购意向,仪器信息网特对其中的仪器设备品目进行梳理,统计出34项仪器设备采购意向,预算总额达1.81亿元。 特别提示 微信机制调整,点击顶部"仪器信息网" → 右上方"…" → 设为 ★ 星标,否则很可能无法看到我们的推送。 近日,z y c g r发布3 4项仪器设备采购意向,预算总额达1 . 8 1亿元,涉及电感耦合等离子刻蚀机、任意波形发生器、动态激光干涉仪、高功率激 光系统、多腔室真空互连镀膜与表征系统等,预计采购时间为2 0 2 5年5月。 Zy c g r 2 0 2 5年5月仪器设备采购意向汇总表 | 采购项目 | | 需求概况 | 预算金 | | 采购时 | | --- | --- | --- | --- | --- | --- | | | | | 额/万元 | | 间 | | 相噪分析 | 采购数量: 1台;2、 交货期 8 周; 3、 质保期:1 年; | | | | 2025年 | | 仪 | 4:包含计量证书二份。 | | | 137 | 5月 | | 超稳激光 | 初样鉴定件一套,满足卫星任务书要求,大部分器件用宇 | | | | 2025年 | ...