EUV薄膜

Search documents
EUV光刻,有变!
半导体行业观察· 2025-03-10 01:20
Core Viewpoint - EUV technology is overcoming challenges such as high costs and complex optical systems, showing significant advantages in processes of 10nm and below, with recent advancements from major companies indicating a new phase of commercial application and development [1]. Group 1: High NA EUV Developments - Intel is the first chip manufacturer to purchase High NA EUV lithography machines, with each machine valued at €350 million, currently used for R&D purposes [3]. - Intel's early results show that High NA machines can complete tasks with fewer exposures and processing steps compared to earlier machines, indicating a strong commitment to leading in the High NA EUV era [3][4]. - imec demonstrated a 90% yield in electrical testing of 20nm spaced metal lines using High NA EUV lithography, confirming the technology's capability at such small dimensions [6][10]. Group 2: Competitive Landscape in DRAM - Micron has introduced its first EUV-based 1γ (1-gamma) 16Gb DDR5 devices, achieving a 20% reduction in power consumption and a 30% increase in bit density compared to previous generations [11][15]. - Micron's transition to EUV is expected to improve economic efficiency for new nodes, combining EUV with multiple patterning DUV technology [15][16]. - The competition among major memory manufacturers is intensifying as Micron adopts EUV, with Samsung and SK Hynix also investing in High NA EUV machines to enhance their competitive edge [17]. Group 3: EUV Mask Technology - Samsung has decided to procure EUV pellicles from Mitsui Chemicals to improve production efficiency, following challenges in yield for its 3nm process [22][23]. - The development of EUV pellicles is crucial for reducing pattern defects in chip manufacturing, with ongoing efforts to enhance the performance and lifespan of these films [21][25]. Group 4: Future of EUV Technology - The ongoing innovation in EUV technology is expected to lead to more efficient, precise, and cost-effective chip manufacturing processes, supporting the semiconductor industry's growth and competitiveness [29].