电子束光刻

Search documents
【必读】会议指南 | (第五届)光刻产业大会(PRIC 2025)
势银芯链· 2025-07-08 02:01
Core Viewpoint - The 2025 TrendBank (Fifth) Lithography Industry Conference will be held on July 9-10, 2025, in Hefei, focusing on advanced lithography technologies and domestic material production challenges [1][4]. Group 1: Conference Overview - The conference will feature participation from 24 industry, academic, and research institutions, including notable companies and universities [1]. - The event is organized by TrendBank and co-organized by the Shenzhen Semiconductor and Integrated Circuit Industry Alliance, with an expected attendance of 300 people [4]. Group 2: Conference Content - Discussions will cover cutting-edge lithography technologies such as Extreme Ultraviolet Lithography (EUV), electron beam lithography, and nanoimprint lithography, along with their latest research advancements and application prospects [5]. - The conference will analyze the current state and technical bottlenecks of domestic lithography materials, including photoresists, wet electronic chemicals, and masks, aiming to enhance self-sufficiency and quality through technological innovation and industrial upgrades [5]. - Key issues and solutions regarding the localization of lithography equipment, which is essential for semiconductor manufacturing, will also be a focal point, including equipment R&D, manufacturing processes, performance improvements, and market conditions [6].
中国研制成功新一代地月空间激光角反射器,助力卫星激光测距;英国南安普敦大学开设全球第二家电子束光刻工厂丨智能制造日报
创业邦· 2025-05-06 03:41
Group 1 - Trina Storage, a subsidiary of Trina Solar, has partnered with US-based FlexGen to deliver a grid-scale battery storage system in Houston, Texas, with a capacity of 371 MWh, utilizing Trina's Elementa King Kong 2 storage solution to enhance system efficiency and reduce cost per kilowatt-hour [1] - The University of Southampton in the UK has opened the world's second electron beam lithography factory, which is the first of its kind outside Japan and the first advanced semiconductor factory in Europe, utilizing high-energy electrons for direct writing of semiconductor circuit patterns [1] - The Zhejiang Songyang Pumped Storage Power Station in China has successfully completed the precision drilling of the country's deepest pumped storage vertical shaft, achieving a directional drilling length of 516 meters with a maximum daily advance of 85.5 meters, demonstrating industry-leading standards in drilling accuracy [1] Group 2 - A Chinese research team has successfully developed a new generation of lunar laser retroreflectors, enabling satellite laser ranging to measure the distance to the moon, marking a significant achievement in space technology [1]