超越极紫外辐射(B-EUV)
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一种微芯片制造的新方法
半导体芯闻· 2025-09-12 10:12
Core Viewpoint - Researchers from Johns Hopkins University have discovered a new material and manufacturing process that could enhance the production of smaller, faster, and more economical microchips, which are essential in modern electronics [2]. Group 1: New Manufacturing Process - The research team has developed a precise and cost-effective manufacturing process capable of creating microscopic circuits that are invisible to the naked eye [2]. - The new method, termed Chemical Liquid Deposition (CLD), allows for the deposition of metal-organic photoresists on silicon wafers with nanometer precision [5]. Group 2: Advancements in Photoresist Materials - A new type of photoresist made from metal-organic compounds has been identified, which can withstand higher power radiation beams necessary for etching smaller details on chips [3]. - Zinc and other metals can absorb Beyond Extreme Ultraviolet (B-EUV) light, generating electrons that trigger the required chemical transformations to imprint circuit patterns on an organic material called imidazole [3][4]. Group 3: Future Implications - The research indicates that at least ten different metals and hundreds of organic compounds can be explored for creating new metal-organic pairings, potentially revolutionizing the manufacturing process in the next decade [5]. - The ability to adjust the components for different wavelengths suggests that metals that perform poorly at one wavelength may excel at another, enhancing the versatility of the manufacturing process [5].