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全国首台国产商业电子束光刻机在杭“出炉”
第一财经· 2025-08-14 02:56
Core Viewpoint - The first domestically produced commercial electron beam lithography machine has entered application testing at a client site, marking a significant advancement in quantum chip research in China [1] Group 1 - The electron beam lithography machine is part of the first batch of incubated projects at the Zhejiang University achievement transformation base [1] - The precision of the new machine is comparable to that of international mainstream equipment, indicating a competitive edge for domestic technology [1] - This development signifies a milestone for the quantum chip research sector in China, providing a "Chinese knife" for the industry [1]