深紫外(DUV)光刻技术
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ASML的魔力揭秘:其EUV优势背后的技术和合作伙伴中国无法复制
Xin Lang Cai Jing· 2025-11-11 00:28
Core Insights - The article emphasizes that while China is attempting to close the lithography gap using domestic tools related to Huawei, extreme ultraviolet (EUV) lithography technology remains a complex and globally collaborative field, with ASML holding a virtual monopoly in this area [1][11] - ASML's dominance is attributed not only to its technological leadership but also to a unique ecosystem that cannot be replicated overnight by any country [1][11] Group 1: ASML's EUV Technology - ASML's EUV lithography is likened to using a "nano-scale surgical knife" to etch circuits, utilizing a special 13.5 nm wavelength light that is 5,000 times thinner than a human hair [2] - The entire lithography process must occur in a vacuum to prevent the EUV light from being absorbed by air, requiring ultra-precise mirrors to capture and focus the light [2][3] - ASML's high NA EUV technology allows for extreme feature sizes to be created in a single exposure by compressing patterns in different directions [3] Group 2: Complexity of ASML's Machines - ASML's EUV machines consist of approximately 100,000 parts, and transporting a single unit is akin to a small military operation, involving 40 shipping containers, three cargo planes, and 20 trucks [6] - The latest High-NA EUV machines are priced over $350 million, highlighting their critical role in producing advanced chips [6] Group 3: Key Suppliers and Collaborations - Zeiss, a key optical partner, developed a mirror-based optical system that operates in a vacuum, with mirrors that have an astonishing precision of 0.1 mm over large areas [7] - ASML's collaboration with Cymer focuses on laser technology, where high-power lasers create plasma from tiny tin droplets to emit EUV light [8] - The immersion lithography breakthrough, which uses a layer of pure water to enhance resolution, was made possible through partnerships with Zeiss and Philips Research [9] Group 4: Competitive Landscape - ASML's CEO stated that China lags 10 to 15 years in chip manufacturing, with the gap potentially being larger due to the intricate technological ecosystem that supports ASML [11] - Even if competitors replicate the appearance of lithography machines, they cannot access the precision optics from Zeiss, the laser technology from Cymer, or the extensive operational data from companies like TSMC [11]