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三步走冲顶亚10nm!俄罗斯公布EUV光刻机路线图!
国芯网· 2025-09-28 08:05
Core Viewpoint - The article discusses Russia's long-term roadmap for developing domestic extreme ultraviolet (EUV) lithography equipment, aiming to enhance its semiconductor manufacturing capabilities while avoiding reliance on traditional EUV technologies [2][6]. Summary by Sections Development Roadmap - The roadmap outlines three main development phases for the EUV lithography equipment: - **Phase 1 (2026-2028)**: Aims to support 40nm process technology with a dual-mirror optical system, achieving a patterning accuracy of 10nm, a maximum exposure field of 3×3 mm, and a throughput of over 5 wafers per hour [3]. - **Phase 2 (2029-2032)**: Plans to introduce a scanning lithography machine supporting 28nm (backward compatible to 14nm), utilizing a four-mirror optical system, improving patterning accuracy to 5nm, a field size of 26×0.5 mm, and a throughput exceeding 50 wafers per hour [3]. - **Phase 3 (2033-2036)**: Targets sub-10nm processes with a six-mirror configuration, achieving a patterning accuracy of 2nm, a maximum exposure field of 26×2 mm, and a throughput of over 100 wafers per hour [3]. Technical Innovations - The proposed EUV system does not replicate ASML's architecture but instead employs a different technology framework, including hybrid solid-state lasers and a xenon plasma-based light source, which reduces maintenance needs and avoids damage to photomasks [2][4]. - The roadmap indicates that the equipment will cover process requirements from 65nm to 9nm, aligning with mainstream critical layer processes expected between 2025 and 2027 [3]. Market Positioning - The development aims to provide a cost-effective solution for smaller foundries, potentially attracting international clients excluded from the ASML ecosystem by offering a clean, efficient, and scalable lithography system without immersion technology or tin-based plasma [6]. - If successfully implemented, the project could enable local production and export of advanced chips at significantly lower capital and operational costs compared to existing solutions [6].
美国也没想到,自己会被直掐命门,特朗普只有放下姿态一条路
Sou Hu Cai Jing· 2025-06-14 08:10
Group 1: U.S.-China Negotiations - The U.S. is facing significant challenges in its industrial sector due to China's control over rare earth exports, which has put critical military production lines at risk of shutdown [1][4] - President Trump is compelled to negotiate with China to alleviate the domestic industrial crisis, which has escalated since the imposition of tariffs [1][12] - The negotiations are complicated by the U.S. offering outdated chip technology as a bargaining chip, which China views as insufficient [15][19] Group 2: Importance of Rare Earth Elements - Rare earth elements are essential for high-tech products, including military aircraft like the F35, which requires over 400 kilograms of rare earth materials per unit [3][4] - The U.S. military's reliance on rare earths extends to future projects, such as the sixth-generation fighter F47, which could face production halts without Chinese supplies [4][12] - The U.S. lacks the refining technology necessary to process its own rare earth resources, making it dependent on China for high-purity industrial materials [5][6][8] Group 3: China's Strategic Position - China has a complete and mature rare earth refining industry, giving it a strategic advantage over the U.S. and its allies [6][19] - The recent negotiations have resulted in China agreeing to temporarily relax export restrictions, but with strict conditions, including limited quotas and monitoring of usage [17][20] - The U.S. is in a precarious position, as it has underestimated China's capabilities and the implications of its own trade policies [19][21]