半导体专用臭氧系统设备
Search documents
国林科技:半导体专用臭氧系统设备能够产生高浓度、超纯净的臭氧
Zheng Quan Ri Bao Wang· 2026-02-02 09:51
Core Viewpoint - Guolin Technology (300786) has developed a semiconductor-specific ozone system that produces high-concentration, ultra-pure ozone, which is widely used in the electronics industry for processes such as CVD and ALD film formation, as well as oxide growth [1] Group 1: Company Insights - The ozone system equipment is designed to meet the stringent requirements of semiconductor manufacturing, including precision, defect control, and material compatibility [1] - Ozone's high oxidizing properties, cleaning efficiency, and environmental characteristics make it suitable for forming nanometer-level uniform oxide layers in 3D NAND storage chip structures [1]
国林科技(300786.SZ):半导体专用臭氧系统设备可以应用于光刻胶去除工艺
Ge Long Hui· 2025-08-18 07:07
Group 1 - The core viewpoint of the article is that Guolin Technology (300786.SZ) has indicated its semiconductor-specific ozone system equipment can be utilized in the process of removing photoresist, which is an organic material [1] - Ozone plays a significant role in the removal of organic substances, highlighting its importance in semiconductor manufacturing processes [1]