半导体臭氧设备
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智桦半导体珠海总部基地正式投产 年产千台套半导体臭氧设备助力国产替代
Ju Chao Zi Xun· 2025-10-14 13:48
Core Insights - Zhuhai Zhihua Semiconductor Technology Co., Ltd. has officially launched its headquarters in the Greater Bay Area Intelligent Manufacturing Industrial Park, marking a significant milestone in the local semiconductor industry [1][3] Investment and Economic Impact - The Zhuhai base has a planned total investment of 200 million yuan, with an expected annual production of 1,000 sets of semiconductor ozone equipment, potentially generating an annual output value of 1 billion yuan and creating 300 quality jobs [3] - The establishment of Zhihua Semiconductor is a result of Zhuhai's continuous efforts in the integrated circuit industry and innovation factor aggregation, positioning it as a new support for high-quality regional economic development [3] Technology and Innovation - The company has mastered the core technology of the entire ozone equipment chain, breaking the foreign monopoly after over a decade of technological breakthroughs [3][4] - Key products include high-concentration ozone gas systems and high-purity ozone water systems, with ozone gas concentrations reaching up to 420 g/m³ and stable ozone water concentrations above 140 ppm, effectively removing nano-level impurities from wafer surfaces [3] - The innovative carbon dioxide functional water system offers an environmentally friendly and efficient solution for the industry [3] Strategic Partnerships and Future Outlook - The investment by Zhuhai Technology Industry Group through its venture capital fund has facilitated Zhihua Semiconductor's entry into the industrial park, creating a closed-loop empowerment model of "fund + park + industry" [3] - The successful establishment of the Zhuhai base fills a technological gap in the domestic high-end cleaning equipment sector and is expected to drive domestic equipment towards international competitiveness [4] - With the release of production capacity and technological iterations, Zhihua Semiconductor is poised to become an indispensable "Chinese force" in the global semiconductor supply chain [4]
国林科技:关于半导体臭氧设备是否更适合于EUV光刻配套,业内处于工艺研究与试验中
Zheng Quan Ri Bao· 2025-08-11 08:13
Group 1 - The company responded to an investor inquiry regarding the suitability of semiconductor ozone equipment for EUV lithography, indicating that it is a future development trend from a technical perspective [2] - The industry is currently in the stage of process research and experimentation regarding this technology [2]